Nanjing Binglab is a modern enterprise integrating R&DThe semiconductor industry has high requirements for product quality and cleanliness of the production environment. Metal contamination is harmful to chips, so metal contamination on silicon wafers should be avoided. The purpose of this study is

Nanjing Binglab is a modern enterprise integrating R&DAbstractThe importance of metal contamination in semiconductor processing and the ultimate yield effects has long been discussed in literature, the ITRS, and most importantly in the fab. Analysis methods including TXRF, VPD ICP-MS, and TOF-SIMS h