6'' PFA wafer transport cassette,25 slots

Product Overview

The PFA Cassette system is the gold standard for wafer and substrate processing in ultra-clean environments. Its robust, open-frame design ensures uniform exposure to process chemicals during cleaning, etching, and rinsing cycles. To ensure a fully integrated workflow, we provide matching Y-Type and M-Type PFA Handles. These handles are designed to snap securely onto the cassette, providing technicians with a safe, heat-resistant, and chemically inert grip to move high-value materials between acid baths and rinsing stations.

Product Synergy & Workflow

• PFA Cleaning Tank: The cassette and handle are perfectly sized for batch submersion in our large-capacity PFA tanks.

• PFA Trays: Used as a secondary containment area for the cassette and handle post-processing to prevent floor or benchtop contamination.

• PFA Fittings & Tubing: Integrated into the rinsing systems where the cassette-loaded wafers are cleaned with ultra-pure water.

Application Fields & Industries

• Semiconductor Fabrication: Processing of 2", 4", 6", or 8" silicon wafers through harsh chemical etching cycles.

• Photovoltaics (Solar): Handling of silicon substrates during surface texturing and doping preparations.

• Optoelectronics: Cleaning of high-purity lenses and glass substrates for precision coating.

• Advanced Materials: Batch decontamination of sensitive components in ultra-clean research environments.