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Wafer Cassette (Basket)
Home Products NJbinglab Semiconductor Wafer Process Wafer Cassette (Basket)

PTFE mask cleaning basket, for 5", 1-5 positions

PTFE mask cleaning basket, for 5
PTFE mask cleaning basket, for 5

PTFE mask cleaning basket, for 5", 1-5 positions

Chemical-Inert Armor: Fabricated from 100% high-purity PTFE, providing total resistance to aggressive lithography chemicals, including Piranha etch (H2SO4/H2O2), developers, and organic solvents.

Precision-Slotted Design: Features CNC-machined grooves that secure masks by the edges, ensuring zero contact with the critical patterned surface.

Maximized Fluid Dynamics: The open-frame architecture allows for high-velocity chemical flow and rapid, bubble-free rinsing across the entire mask face.

Superior Surface Finish: The ultra-smooth, non-stick PTFE surface prevents particle entrapment and eliminates the risk of scratching sensitive quartz or glass substrates.

Fully Customizable Architecture: Slot pitch, pocket depth, and overall dimensions can be bespoke-tailored to fit any mask size.

  • Brand :

    NJbinglab
  • Item No :

    PTFE-HL-YMB-5S-5
  • material :

    PTFE
  • Specification :

    5 inches, 1-5 positions

Product Overview

The PTFE Mask Cleaning Basket is an essential tool for high-end semiconductor and micro-optics fabrication. During the critical cleaning stages of mask manufacturing or pellicle mounting, maintaining a "metal-free" and particle-free environment is non-negotiable. Our PTFE baskets are engineered to replace traditional plastic or metal carriers that can leach contaminants or shed particulates in harsh cleaning chemistries. The design focuses on structural rigidity and minimal mask-to-basket contact, ensuring that every cleaning, stripping, and rinsing cycle yields a pristine, defect-free mask surface.

 

Bespoke Customization Services

We specialize in providing tailored solutions to match your specific wet-bench and mask geometry:

  • Custom Slot Configurations: Adjustable slot spacing to accommodate various mask thicknesses or to increase batch capacity within a fixed footprint.

  • Integrated Handle Systems: Can be equipped with fixed or detachable PTFE/PFA handles (Y-Type, M-Type, or folding styles) for manual or robotic integration.

  • Drip-Dry Optimizations: Specialized base angles can be machined to facilitate efficient drainage, reducing "water spots" during the drying phase.

  • Tank-Specific Footprints: Custom exterior dimensions to fit perfectly into your ultrasonic cleaners, megasonic baths, or specialized PFA cleaning tanks.

Product Synergy & Workflow

Optimized for the advanced lithography cleaning chain:

  • PFA/PTFE Cleaning Tanks: The primary vessel for submerging the basket in heated acid baths or DI water rinses.

  • PFA Fittings & Tubing: Integral for constructing the high-purity spray-rinse systems that clean the masks while housed in the basket.

  • PTFE Tweezers & Tools: Used for the safe loading and unloading of masks into the precision slots of the basket.

 

Application Fields & Industries

  • Photomask Manufacturing: Batch cleaning of quartz and soda-lime glass masks during the initial chrome-deposition and patterning phases.

  • Semiconductor Lithography: Periodic cleaning of reticles to remove pellicle adhesive residue or atmospheric contaminants.

  • MEMS & Nano-Fabrication: Handling of specialized masks used in the production of sensors and microfluidic devices.

  • High-Precision Optics: Cleaning of optical filters and glass plates requiring extreme chemical resistance and zero-scratch handling.

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